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Title MEMS packaging [electronic resource] / edited by Tai-Ran Hsu.
Publication Info. London : INSPEC, c2004.
Location Call No. Status Notes
 Libraries Electronic Books  ELECTRONIC BOOK-Knovel    AVAIL. ONLINE
Description 1 online resource (xxix, 275 p.) : ill.
Series EMIS processing series ; no. 3.
Bibliography Includes bibliographical references and index.
Note Description based on print version record.
Access Use copy Restrictions unspecified star MiAaHDL
Reproduction Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
System Details Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
Note digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
Subject Microelectromechanical systems.
Microelectronic packaging.
Added Author Hsu, Tai-Ran.
INSPEC (Information service)
Related To Print version: MEMS packaging. London : INSPEC, c2004 0863413358 (OCoLC)53030765
Standard No. 607067497 646557769 646822679 729386039
ISBN 9781849190626 (electronic bk.)
1849190623 (electronic bk.)
0863413358
9780863413353
9781615839629 (electronic bk.)
1615839623 (electronic bk.)
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