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Title Poly-SiGe for MEMS-above-CMOS sensors [electronic resource] / Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
Publication Info. Dordrecht ; New York : Springer, c2014.

Location Call No. Status Notes
 Libraries Electronic Books  ELECTRONIC BOOKS-DDA    AVAIL. ONLINE
Description 1 online resource.
Series Springer series in advanced microelectronics ; v.44.
Bibliography Includes bibliographical references.
Reproduction Electronic reproduction. Perth, W.A. Available via World Wide Web.
Note Description based on online resource; title from PDF title page (SpringerLink, viewed July 29, 2013).
Subject Microelectromechanical systems.
Metal oxide semiconductors, Complementary.
Systems engineering.
Optical materials.
Surfaces (Physics).
Electronic Circuits and Devices.
Circuits and Systems.
Optical and Electronic Materials.
Nanotechnology and Microengineering.
Characterization and Evaluation of Materials.
Added Author Meyer, Kristin De.
Witvrouw, Ann.
Ebooks Corporation
ISBN 9789400767997 (electronic bk.)
9400767994 (electronic bk.)
OCLC # EBC1399059
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