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Title Chemical vapour deposition [electronic resource] : precursors, processes and applications / edited by Anthony C. Jones, Michael L. Hitchman.
Publication Info. Cambridge, UK : Royal Society of Chemistry, c2009.
Location Call No. Status Notes
 Libraries Electronic Books  ELECTRONIC BOOK-Knovel    AVAIL. ONLINE
Description 1 online resource (xv, 582 p.) : ill., plans.
Bibliography Includes bibliographical references and index.
Note Description based on print version record.
Subject Chemical vapor deposition.
Added Author Jones, Anthony C.
Hitchman, Michael L.
Added Title Chemical vapor deposition
Related To Print version: Chemical vapour deposition. Cambridge, UK : Royal Society of Chemistry, c2009 9780854044658 (DLC) 2009419379 (OCoLC)244653597
Standard No. 300197123
ISBN 9781847558794 (electronic bk.)
1847558798 (electronic bk.)
9781621987031 (electronic bk.)
1621987035 (electronic bk.)
9780854044658 (hbk.)
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