Introduction -- Principles and Status of Nanoimprint Lithography -- Stamp Fabrication -- Stamp Surface Treatment -- Nanoimprint Lithography Resists -- Nanoimprint lithography process -- Modeling and simulation of NIL -- Application of NIL in light-emitting diode -- Application of NIL in memory devices -- Application of NIL in solar cell.
Includes bibliographical references and index.
Electronic reproduction. Perth, W.A. Available via World Wide Web.
Description based on online resource; title from digital title page (viewed on Feb. 21, 2013).