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Title Nanoimprint lithography [electronic resource] : an enabling process for nanofabrication / Weimin Zhou.
Author Zhou, Weimin.
Publication Info. Heidelberg ; New York : Springer, c2013.

Location Call No. Status Notes
 Libraries Electronic Books  ELECTRONIC BOOKS-DDA    AVAIL. ONLINE
Description 1 online resource.
Contents Introduction -- Principles and Status of Nanoimprint Lithography -- Stamp Fabrication -- Stamp Surface Treatment -- Nanoimprint Lithography Resists -- Nanoimprint lithography process -- Modeling and simulation of NIL -- Application of NIL in light-emitting diode -- Application of NIL in memory devices -- Application of NIL in solar cell.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Perth, W.A. Available via World Wide Web.
Note Description based on online resource; title from digital title page (viewed on Feb. 21, 2013).
Subject Nanolithography.
Added Author Ebooks Corporation
Related To Print version: Zhou, Weimin Nanoimprint Lithography : An Enabling Process for Nanofabrication Dordrecht : Springer, c2012 9783642344275
ISBN 9783642344282 (electronic bk.)
3642344283 (electronic bk.)
OCLC # EBC1082806
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