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Title Handbook of thin film deposition [electronic resource] : techniques, processes, and technologies / edited by Krishna Seshan.
Publication Info. Waltham [Mass.] : William Andrew, 2012
Edition 3rd ed.
Location Call No. Status Notes
 Libraries Electronic Books  ELECTRONIC BOOK-Knovel    AVAIL. ONLINE
Description 1 online resource (xviii, 392 p.)
Subject Thin film devices -- Design and construction -- Handbooks, manuals, etc.
Thin films.
Thin film devices -- Design and construction.
Added Author Seshan, Krishna.
Related To Print version: 9781437778731 1437778739
ISBN 1437778747 (electronic bk.)
9781437778748 (electronic bk.)
9781437778731 (hbk.)
1437778739 (hbk.)
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